| publication name | “Damage introduced in silicon on insulator materials during fabrication by oxygen ion implantation technique” Al—Azhar Engineering 3rd International Conference, Cairo, Egypt, vol 6, pp. 37—48, Dec. 18—21. |
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| Authors | A. I. EL-SHANSHOURY, I. A. EL-SHANSHOURY, M. T. ELEWA and H. F. RAGAIE |
| year | 1993 |
| keywords | |
| journal | |
| volume | Not Available |
| issue | Not Available |
| pages | Not Available |
| publisher | Not Available |
| Local/International | Local |
| Paper Link | Not Available |
| Full paper | download |
| Supplementary materials | Not Available |
Abstract
Not Available