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“Damage introduced in silicon on insulator materials during fabrication by oxygen ion implantation technique” Al—Azhar Engineering 3rd International Conference, Cairo, Egypt, vol 6, pp. 37—48, Dec. 18—21.

• 1993
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Authors A. I. EL-SHANSHOURY, I. A. EL-SHANSHOURY, M. T. ELEWA and H. F. RAGAIE
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publication.type Local
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