Staff Members - Benha University
Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge
JOURNAL OF MODERN PHYSICS • 2014
Publication Information
Authors
Mohamed Ali Hassouba · Ahmed Rida Galaly · Usama Mohamed Rashed
Keywords
Not Available
Journal
JOURNAL OF MODERN PHYSICS
Publisher
Not Available
Volume
5
Issue
8
Pages
Not Available
publication.type
International
Paper Link
Not Available
Supplementary Materials
Not Available
Abstract
Not Available