Ultrahigh-sensitivity graphene-based strain gauge sensor: fabrication on Si/SiO2 and first-principles simulation
Sensors and Materials • 2018
Publication Information
Authors
M Gamil, A El-Bab, AA El-Moneim, K Nakamura
Keywords
chemical vapor deposition, strain gauge, gauge factor, piezoresistive sensors, MEMS devices, first-principles calculation
Journal
Sensors and Materials
Publisher
MYU Tokyo
Volume
30
Issue
9
Pages
2085–2100
publication.type
International
Paper Link
Open Link
Supplementary Materials
Not Available
Abstract
Monolayer and multilayer graphene films have been grown on a Cu substrate by chemical vapor deposition (CVD) and then transferred onto a SiO2/Si substrate using polymethyl methacrylate (PMMA) to fabricate an ultrasensitive graphene-based strain gauge sensor. The graphene films were patterned using a CO2 laser beam. The sensitivity and temperature dependence of the gauge factor (GF) of the fabricated sensors were examined at different applied strains and operating temperatures up to 0.05% and 75 °C, respectively. The fabricated gauges based on monolayer and multilayer graphene films show stable GFs of 255 and 104 within the applied temperature range, respectively. The patterning technique provides an interesting, low-cost, fast, and high-throughput process to realize scalable microfabrication for highly sensitive strain sensors with good temperature stability based on graphene piezoresistivity. A theoretical simulation of the GF of monolayer graphene has also been carried out on the basis of first-principles calculation. Simulation results follow the measured GFs in our experiment and other references.
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