Theme-Logo
  • Login
  • Home
  • Course
  • Publication
  • Theses
  • Reports
  • Published books
  • Workshops / Conferences
  • Supervised PhD
  • Supervised MSc
  • Supervised projects
  • Education
  • Language skills
  • Positions
  • Memberships and awards
  • Committees
  • Experience
  • Scientific activites
  • In links
  • Outgoinglinks
  • News
  • Gallery
publication name Ultrahigh-sensitivity graphene-based strain gauge sensor: fabrication on Si/SiO2 and first-principles simulation
Authors M Gamil, A El-Bab, AA El-Moneim, K Nakamura
year 2018
keywords chemical vapor deposition, strain gauge, gauge factor, piezoresistive sensors, MEMS devices, first-principles calculation
journal Sensors and Materials
volume 30
issue 9
pages 2085–2100
publisher MYU Tokyo
Local/International International
Paper Link https://myukk.org/SM2017/sm_pdf/SM1662.pdf
Full paper download
Supplementary materials Not Available
Abstract

Monolayer and multilayer graphene films have been grown on a Cu substrate by chemical vapor deposition (CVD) and then transferred onto a SiO2/Si substrate using polymethyl methacrylate (PMMA) to fabricate an ultrasensitive graphene-based strain gauge sensor. The graphene films were patterned using a CO2 laser beam. The sensitivity and temperature dependence of the gauge factor (GF) of the fabricated sensors were examined at different applied strains and operating temperatures up to 0.05% and 75 °C, respectively. The fabricated gauges based on monolayer and multilayer graphene films show stable GFs of 255 and 104 within the applied temperature range, respectively. The patterning technique provides an interesting, low-cost, fast, and high-throughput process to realize scalable microfabrication for highly sensitive strain sensors with good temperature stability based on graphene piezoresistivity. A theoretical simulation of the GF of monolayer graphene has also been carried out on the basis of first-principles calculation. Simulation results follow the measured GFs in our experiment and other references.

Benha University © 2023 Designed and developed by portal team - Benha University