| publication name | Investigation of a new high sensitive micro-electromechanical strain gauge sensor based on graphene piezoresistivity |
|---|---|
| Authors | Mohammed Gamil, Osamu Tabata, Koichi Nakamura, Ahmed MR El-Bab, Ahmed Abd El-Moneim |
| year | 2014 |
| keywords | |
| journal | |
| volume | Not Available |
| issue | Not Available |
| pages | Not Available |
| publisher | Not Available |
| Local/International | International |
| Paper Link | http://www.scientific.net/KEM.605.207 |
| Full paper | download |
| Supplementary materials | Not Available |
Abstract
A new strain gauge based on graphene piezoresistivity was fabricated by a novel low cost technique which suits mass production of micro piezoresistor sensors. The strain gauge consists of a monolayer graphene film made by chemical vapor deposition on a copper foil surface, and transferred to Si/SiO2 surface by using a polymethyl-methacrylate (PMMA) assisted transfer method. The film is shaped by laser machine to work as a conductive-piezoresistive material between two deposited electrical silver electrodes. This method of fabrication provides a high productivity due to the homogeneous distribution of the graphene monolayer all over the Si/SiO2 surface. The experimentally measured gauge factor of graphene based device is 255, which promises a new strain gauge sensor of high sensitivity.