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publication name Investigation of a new high sensitive micro-electromechanical strain gauge sensor based on graphene piezoresistivity
Authors Mohammed Gamil, Osamu Tabata, Koichi Nakamura, Ahmed MR El-Bab, Ahmed Abd El-Moneim
year 2014
keywords
journal
volume Not Available
issue Not Available
pages Not Available
publisher Not Available
Local/International International
Paper Link http://www.scientific.net/KEM.605.207
Full paper download
Supplementary materials Not Available
Abstract

A new strain gauge based on graphene piezoresistivity was fabricated by a novel low cost technique which suits mass production of micro piezoresistor sensors. The strain gauge consists of a monolayer graphene film made by chemical vapor deposition on a copper foil surface, and transferred to Si/SiO2 surface by using a polymethyl-methacrylate (PMMA) assisted transfer method. The film is shaped by laser machine to work as a conductive-piezoresistive material between two deposited electrical silver electrodes. This method of fabrication provides a high productivity due to the homogeneous distribution of the graphene monolayer all over the Si/SiO2 surface. The experimentally measured gauge factor of graphene based device is 255, which promises a new strain gauge sensor of high sensitivity.

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