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Investigation of a new high sensitive micro-electromechanical strain gauge sensor based on graphene piezoresistivity

• 2014
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Publication Information
Authors Mohammed Gamil, Osamu Tabata, Koichi Nakamura, Ahmed MR El-Bab, Ahmed Abd El-Moneim
Keywords Not Available
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publication.type International
Paper Link Open Link
Supplementary Materials Not Available
Abstract
A new strain gauge based on graphene piezoresistivity was fabricated by a novel low cost technique which suits mass production of micro piezoresistor sensors. The strain gauge consists of a monolayer graphene film made by chemical vapor deposition on a copper foil surface, and transferred to Si/SiO2 surface by using a polymethyl-methacrylate (PMMA) assisted transfer method. The film is shaped by laser machine to work as a conductive-piezoresistive material between two deposited electrical silver electrodes. This method of fabrication provides a high productivity due to the homogeneous distribution of the graphene monolayer all over the Si/SiO2 surface. The experimentally measured gauge factor of graphene based device is 255, which promises a new strain gauge sensor of high sensitivity.