Staff Members - Benha University
Perturbation analysis of an electrostatic Micro-Electro-Mechanical System (MEMS) subjected to external and non-linear parametric excitations
International Journal of Basic and Applied Sciences • 2014
Publication Information
Authors
G A. Mosa; A M. Elnaggar, A F. El-Bassiouny
Keywords
MEMS, Weakly non-linear dynamical systems, Micro-cantilever, Parametric and Forcing excitations
Journal
International Journal of Basic and Applied Sciences
Publisher
Science Publishing Corporation
Volume
3
Issue
3
Pages
209-223
publication.type
International
Paper Link
Open Link
Supplementary Materials
Not Available
Abstract
Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in
sensing and actuating devices in MEMS. In this paper the perturbation analysis of the electrostatically actuated
MEMS resonant sensors which represented by a modiØed Du±ng - Van der Pol equation subjected to weakly
non-linear parametric and external excitations is studied by using a perturbation technique (multiple time scales).
Harmonic resonance and subharmonic resonances of order (
1
2
and
1
3
) are investigated. For each resonances we
obtain the modulation equations in the amplitude and phase, steady state solutions, frequency-response equations
and stability conditions are determined. EÆects of diÆerent parameters on the system behavior are investigated
numerically. Results are presented graphically and discussion is provided.
sensing and actuating devices in MEMS. In this paper the perturbation analysis of the electrostatically actuated
MEMS resonant sensors which represented by a modiØed Du±ng - Van der Pol equation subjected to weakly
non-linear parametric and external excitations is studied by using a perturbation technique (multiple time scales).
Harmonic resonance and subharmonic resonances of order (
1
2
and
1
3
) are investigated. For each resonances we
obtain the modulation equations in the amplitude and phase, steady state solutions, frequency-response equations
and stability conditions are determined. EÆects of diÆerent parameters on the system behavior are investigated
numerically. Results are presented graphically and discussion is provided.