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Resonance Frequencies of Size Dependent Perforated Nonlocal Nanobeam.

Microsystem Technologies • 2018
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Publication Information
Authors Eltaher, M. A., Abdraboh, A. M., Almitani., K. H.
Keywords Not Available
Journal Microsystem Technologies
Publisher Springer
Volume 24
Issue 9
Pages 3925-3937
publication.type International
Paper Link Open Link
Supplementary Materials Not Available
Abstract
Perforation is a common procedure in fabrication process of micro/nano-electromechanical systems (M/NEMS). Therefore,
this paper presents an effort to study the resonance frequencies of size dependent regular square perforated nonlocal
nanobeam, which not be discussed before. Equivalent characteristic parameters of perforated beam such as, bending
stiffness, shear stiffness, mass, and rotary inertia are presented. The size-scale effect of long-range atomic interaction of
nanobeam is described by using nonlocal differential form of Eringen model. Constitutive and governing equations of local
and nonlocal perforated Timoshenko and Euler–Bernoulli nanobeam are derived. Analytical solution are exploited to solve
the proposed model and derived closed form frequency equations as function of nanoscale and perforation parameters. The
verification of current model is presented and compared with published works. Numerical results are illustrated to present
the influences of length scale parameter, number of perforated holes, perforation size, and shear effects on the natural
frequencies of both nanobeams theories. The obtained results are supportive in mechanical design of high-precision
measurement nanobeams sensor and actuators