| publication name | Measurements of electron energy distribution function in positive column region of DC-magnetron sputtering device. XXIII International Conf. on Phenomena in Ionized Gases, July, 1997, France. |
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| Authors | |
| year | 1997 |
| keywords | |
| journal | |
| volume | Not Available |
| issue | Not Available |
| pages | Not Available |
| publisher | Not Available |
| Local/International | Local |
| Paper Link | Not Available |
| Full paper | download |
| Supplementary materials | Not Available |
Abstract
Not Available