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Investigation of a new high sensitive micro-electromechanical strain gauge sensor based on graphene piezoresistivity

• 2014
العودة
معلومات البحث
المؤلفون Mohammed Gamil, Osamu Tabata, Koichi Nakamura, Ahmed MR El-Bab, Ahmed Abd El-Moneim
الكلمات المفتاحية Not Available
المجلة العلمية Not Available
الناشر Not Available
المجلد Not Available
العدد Not Available
الصفحات Not Available
publication.type International
رابط البحث Open Link
المواد المرفقة Not Available
الملخص
A new strain gauge based on graphene piezoresistivity was fabricated by a novel low cost technique which suits mass production of micro piezoresistor sensors. The strain gauge consists of a monolayer graphene film made by chemical vapor deposition on a copper foil surface, and transferred to Si/SiO2 surface by using a polymethyl-methacrylate (PMMA) assisted transfer method. The film is shaped by laser machine to work as a conductive-piezoresistive material between two deposited electrical silver electrodes. This method of fabrication provides a high productivity due to the homogeneous distribution of the graphene monolayer all over the Si/SiO2 surface. The experimentally measured gauge factor of graphene based device is 255, which promises a new strain gauge sensor of high sensitivity.